Spectroscopic Study of TiO<i>_x</i> Film for Novel n-type Semiconductor/insulator/p-type Semiconductor Rechargeable Device

• YABUHARA Hidehiko

  Corporate Manufacturing Engineering Center, Toshiba Corp.

• SASAKI Akito

  Toshiba Material Co., Ltd.

• KATAOKA Yoshinori

  Toshiba Material Co., Ltd.

• SUZUKI Koji

  Toshiba Material Co., Ltd.

• ITO Takahiro

  Geomatec Co., Ltd.

• TAKAGI Shigeyuki

  School of Engineering, Tokyo University of Technology

• HIRABAYASHI Hideaki

  Toshiba Material Co., Ltd.

抄録

We have demonstrated a novel semiconductor rechargeable battery (capacitor-like device), which uses electrons, holes and no mobile ions, having a TiO_x/SiN_y/NiO_z laminated structure with a capacity 5000 times larger than that of a conventional parallel plate capacitor. In this study, photoluminescence, cathodoluminescence and Raman spectroscopy of TiO_x (x = 1.92, 2.00 and 2.04) films were carried out. We showed some correlations between these spectroscopic characteristics of TiO_x having different oxygen compositions and the capacitor performance of a TiO_x/SiN_y/NiO_z laminated structure.

収録刊行物

• Electrochemistry

  Electrochemistry 88 (3), 240-242, 2020-05-05

  公益社団法人　電気化学会

キーワード

• Battery
• Capacitor
• Titanium Oxide
• Photoluminescence

詳細情報

• CRID: 1390848250109497984
• NII論文ID: 130007840141
• DOI: 10.5796/electrochemistry.19-00071
• ISSN: 21862451
• ISSN: 13443542
• Web Site: https://www.jstage.jst.go.jp/article/electrochemistry/88/3/88_19-00071/_pdf
• 本文言語コード: en
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• 抄録ライセンスフラグ: 使用可