Efficient Removal of Noise-derived Components for Automatic XPS Spectral Decomposition Using Hierarchical Clustering
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- Murakami Ryo
- Department of Electrical and Computer Engineering, National Institute of Technology, Yonago College
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- Nakamura Kazuki
- Department of Electrical and Computer Engineering, National Institute of Technology, Yonago College
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- Tanaka Hiromi
- Department of Electrical and Computer Engineering, National Institute of Technology, Yonago College
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- Shinotsuka Hiroshi
- Research and Services Division of Materials Data and Integrated System, National Institute for Materials Science
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- Yoshikawa Hideki
- Research and Services Division of Materials Data and Integrated System, National Institute for Materials Science
抄録
<p>In this paper, we aim to automatically provide a solution to peak separation in an X-ray photoelectron spectroscopy (XPS) spectrum with non-negligible statistical noise that is inevitably accepted in multi-dimensional (e.g., 2-dimensional/3-dimensional XPS profiles) XPS measurement. To achieve this, in our previous study [H. Shinotsuka et al., J. Electron Spectros. Relat. Phenomena 239, 146903 (2020)], we automatically selected optimal solutions using the Bayesian information criterion (BIC) for measured XPS spectra. This was successfully performed for many varieties of XPS spectra. However, the optimal solution rarely included a small and sharp peak that was likely to be caused by statistical noise. In this study, we investigate a practical method to eliminate the infrequent solution with a noise-derived peak. This method uses hierarchical clustering with peak parameters (i.e., width and area) as a preprocessing step before selecting the solutions using the BIC.</p>
収録刊行物
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- e-Journal of Surface Science and Nanotechnology
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e-Journal of Surface Science and Nanotechnology 18 (0), 201-207, 2020-05-28
公益社団法人 日本表面真空学会
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詳細情報 詳細情報について
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- CRID
- 1390285300160374272
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- NII論文ID
- 130007848464
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- ISSN
- 13480391
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
- KAKEN
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- 抄録ライセンスフラグ
- 使用不可