Angular Distribution of Sputtered Particles in Shave-off Section Processing with SDTrimSP

• Kang So -Hee

  Institute of Industrial Science, The University Tokyo

• Matsumura Kohei

  Institute of Industrial Science, The University Tokyo

• Azuma Takeki

  Institute of Industrial Science, The University Tokyo

• Tomiyasu Bunbunoshin

  Institute of Industrial Science, The University Tokyo Environmental Science Center, The University of Tokyo

• Owari Masnori

  Institute of Industrial Science, The University Tokyo Environmental Science Center, The University of Tokyo

Abstract

The angular distribution of secondary ions is one of the essential elements for development of three-dimensional (3D) shave-off SIMS. The magnification lens system in the 3D shave-off SIMS was designed and assembled based on the detection position of the detector. However, shave-off condition of high incidence energy (30 keV) and angle of incidence (87 degrees), we simulated the angular distribution of sputtered particles using the SDTrimSP program and compared the results with the previous shave-off experimental data. Even unusual the shave-off beam, the SDTrimSP simulation results showed a good agreement and a similar tendency with the experimental data. SDTrimSP simulation is expected to be useful in obtaining the sputtered particle information for development and instrumentation of 3D shave-off SIMS.

Journal

• Journal of Surface Analysis

  Journal of Surface Analysis 25 (3), 165-171, 2019

  The Surface Analysis Society of Japan

Details

• CRID: 1390285300162219264
• NII Article ID: 130007852040
• NII Book ID: AA11448771
• DOI: 10.1384/jsa.25.165
• ISSN: 13478400
• ISSN: 13411756
• NDL BIB ID: 029565650
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I029565650
• Web Site: https://www.jstage.jst.go.jp/article/jsa/25/3/25_165/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed