Selection of Support Materials for Uniform MoS₂ Monolayer Formation by Chemical Vapor Deposition

• Yoshihara Naoki

  Department of Chemical Engineering, Fukuoka University

• Sano Akira

  Department of Chemical Engineering, Fukuoka University

• Urakawa Kouki

  Department of Chemical Engineering, Fukuoka University

• Noda Masaru

  Department of Chemical Engineering, Fukuoka University

• Kato Takafumi

  Department of Chemical Engineering, Fukuoka University

抄録

Transition metal dichalcogenides (TMDCs) and related layered materials have attracted increased attention due to their intriguing chemical, physical, electrical and optical properties. Here, we investigated the influence of surface properties, which are their morphology and chemical composition, on the chemical vapor deposition (CVD) synthesis of a uniform molybdenum disulfide (MoS₂) monolayer on support materials with several structures, such as flat, tubular, and porous materials. We found that, even under similar CVD conditions, the structure of the as-synthesized MoS₂ layer differed significantly between sapphire and SiO₂/Si substrates. Raman and photoluminescence (PL) measurements demonstrate that the surface chemical composition contributed to the self-assembly crystal growth of MoS₂, affecting layer stacking. Moreover, the MoS₂ layer synthesis by CVD on tubular and porous materials is also demonstrated. This work provides insights into the CVD synthesis of uniform MoS₂ monolayers on several support materials with the advantages of one-pod, non-transferrable, and compatible with direct applications.

収録刊行物

• Transactions of the Materials Research Society of Japan

  Transactions of the Materials Research Society of Japan 45 (3), 81-84, 2020-06-01

  一般社団法人 日本MRS

キーワード

• Molybdenum disulfide
• CVD
• Support materials
• Surface interaction
• Surface morphology

詳細情報

• CRID: 1390848250125887744
• NII論文ID: 130007869023
• DOI: 10.14723/tmrsj.45.81
• ISSN: 21881650
• ISSN: 13823469
• Web Site: https://www.jstage.jst.go.jp/article/tmrsj/45/3/45_81/_pdf
• 本文言語コード: en
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