Measurement of piezoelectric properties of hydroxyapatite thin films fabricated by pulsed laser deposition method

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  • Nishigaki Tsutomu
    Department of Biomechanical and Human Factors Engineering, Faculty of Biology-oriented Science and Technology, Kinki University
  • Nishikawa Hiroaki
    Department of Biomedical Engineering, Faculty of Biology-oriented Science and Technology, Kinki University
  • Kusunoki Masanobu
    Department of Biomedical Engineering, Faculty of Biology-oriented Science and Technology, Kinki University
  • Hashimoto Yoshiya
    Department of Biomaterials, Osaka Dental University
  • Hontsu Shigeki
    Department of Biomedical Engineering, Faculty of Biology-oriented Science and Technology, Kinki University

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Other Title
  • レーザーアブレーション法により作製したハイドロキシアパタイト薄膜の圧電性の評価
  • レーザーアブレーションホウ ニ ヨリ サクセイ シタ ハイドロキシアパタイト ハクマク ノ アツデンセイ ノ ヒョウカ

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Abstract

In order to measure the piezoelectric properties of the hydroxyapatite(HAp) films, we have fabricated Cu/ HAp/Ti or Cu/HAp/Pt structure. At first, a 1.5μm thick HAp was deposited on a Ti or Pt substrate using the KrF pulsed laser deposition(PLD) method. After the HAp deposition, the HAp film was crystallized by postannealing in nitrogen gas atmosphere and cooled slowly in an electric furnace. Then, a Cu top electrode sheet was attached on the HAp film. Finally, one end of the Cu/HAp/Ti or Cu/HAp/Pt structure was clamped to compose a vibrating cantilever beam. Piezoelectric coefficients were estimated by output voltage responses of HAp films measured by a operational amplifier circuit when the Cu/HAp/Ti or Cu/HAp/Pt beam was excited by a mini-shaker at the first natural frequency of the beam. The results showed the piezoelectricity of the artificially synthesized HAp films.

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