The effect of SrTiO3 seed and application of in-situ magnetic field on the preparation of Pb(Zr, Ti)O3 thin film by pulsed laser deposition

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Abstract

Polycrystalline Pb(Zr,Ti)O3 thin film was prepared on SrTiO3/Pt/CeO2/SiO2/Si substrate by pulsed laser deposition with in-situ magnetic field (Dynamic Aurora PLD method). SrTiO3 and CeO2 layers were also prepared by this method, and Pt layer (bottom electrode was prepared by rf magnetron sputtering). Dynamic Aurora PLD method enabled to lower crystallization temperature for CeO2 (below 300 oC, even at room temperature), SrTiO3 (400 oC) as well as PZT (400 oC). CeO2 layer was used to improve the crystallinity of Pt bottom electrode. SrTiO3 layer was used as a seed layer to help the crystallization of PZT. In case of CeO2, amorphous film was obtained without application of magnetic field. This indicates that application of magnetic field has the key to lower the crystallization temperature. Under 2000 G of magnetic field, clear CeO2(111) peak was observed. For SrTiO3, it was also found that the crystallinity of SrTiO3 changes with the atmosphere during deposition; the crystallinity is not necessarily high in O2 atmosphere and the crystallinity was high in N2O atmosphere. Similar effect was also observed on the preparation of PZT thin film. Since it is known that N2O decomposes into N2 and atomic oxygen, and the atomic oxygen is very active. Therefore, application of magnetic field in the N2O atmosphere would enhance the formation of atomic oxygen to lower crystallization temperature of SrTiO3 and PZT thin films.

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