Microfabrication using 3D lithography technology

• SUZUKI Takaaki

  Faculty of Science and Technology, Gunma University

Bibliographic Information

Other Title

• 3次元リソグラフィ技術を用いた微細加工
• 3ジゲン リソグラフィ ギジュツ オ モチイタ ビサイ カコウ

Abstract

Semiconductor manufacturing and MEMS (micro-electromechanical systems) technologies are progressing into three-dimensional (3D) fabrication. The micro/nano fabrication technique "3D lithography" is for processing special 3D complex microstructures on large areas that are difficult to manufacture by other fabrication methods. This article describes an outline of 3D lithography and its application to a vibration MEMS energy harvester and biomicrosystems, which consist of polymer MEMS integrated with characteristic structures.

Journal

• Oyo Buturi

  Oyo Buturi 89 (10), 589-593, 2020-10-10

  The Japan Society of Applied Physics

Details

• CRID: 1390848647564198272
• NII Article ID: 130007925041
• NII Book ID: AN00026679
• DOI: 10.11470/oubutsu.89.10_589
• ISSN: 21882290
• ISSN: 03698009
• NDL BIB ID: 030690557
• Web Site: http://id.ndl.go.jp/bib/030690557
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I030690557
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed