Three-dimensional Metamaterials and Their Fabrication Techniques

  • TANAKA Takuo
    RIKEN, Metamaterials Laboratory and Innovative Photon Manipulation Team Tokyo Institute of Technology

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  • 3次元機能光メタマテリアルとその加工法
  • 3ジゲン キノウ ヒカリ メタマテリアル ト ソノ カコウホウ

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Abstract

Stereoscopic structure is essential to realize three-dimensional functional metamaterials. Several fabrication techniques for such a stereoscopic metamaterial structure are reviewed, and as a novel and promising technique for the large area 3D metamaterials, metal-stress driven self-folding method, which uses electron beam lithography and self-organized formation of resonator rings using residual stress of metal thin films, is introduced. As an example of 3D functions of metamterial, isotropic effective index of 0.35 was experimentally demonstrated at 30 THz.

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