He⁺ LEIS analysis combined with pulsed jet technique of ethanol sensing by a ZnO surface

• Suzuki Taku T.

  National Institute for Materials Science

• Adachi Yutaka

  National Institute for Materials Science

• Ohgaki Takeshi

  National Institute for Materials Science

• Sakaguchi Isao

  National Institute for Materials Science

Bibliographic Information

Other Title

• パルスジェット法と組合わせた低速He⁺イオン散乱分光によるZnO表面のエタノールセンシングに関する分析

Abstract

Low-energy He⁺ ion scattering spectroscopy (He⁺ LEIS) was combined with the pulsed jet technique to analyze the outermost surface of a Zn-ZnO (0001) substrate that is sensing trace ethanol (EtOH, 50 ppmv) contained in the air. The gas sensing response to EtOH by ZnO under static atmospheric pressure was successfully simulated by the periodically pulsed gas jet irradiation onto the surface while keeping the background pressure low enough to operate He⁺ LEIS. It was found that the gas sensing response to EtOH is due to the surface compositional change analyzed by He⁺ LEIS. Thus, the gas sensing response to EtOH is caused by adsorption of EtOH-related molecules on the surface, which governs the oxygen ionosorption. It was demonstrated that the combination of He⁺ LEIS and the pulsed jet technique is a useful approach to analyze the outermost surface of a gas sensor in the realistic working condition.

Journal

• Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science

  Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science 2020 (0), 177-, 2020

  The Japan Society of Vacuum and Surface Science

Details

• CRID: 1390849931315374720
• NII Article ID: 130007959292
• DOI: 10.14886/jvss.2020.0_177
• ISSN: 24348589
• Text Lang: ja
• Data Source:
  • JaLC
  • CiNii Articles
• Abstract License Flag: Disallowed