書誌事項
- タイトル別名
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- Performance Improvement of Filter-Free Fluorescence Sensor in Near-Ultraviolet Region Aiming for Biosensing Application
- バイオセンシング オ シコウ シタ フィルタフリー ケイコウ センサ ノ キン シガイコウ ケンシュツノウ ノ コウジョウ
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<p>Detection performance of filter-free fluorescence sensors in the near-ultraviolet region has improved in this study. Thinner polycrystalline-Si film and indium tin oxide film were introduced as materials of photogate which required high transparency for sensitive measurement. Optical property of the photogate material was evaluated. Filter-free fluorescence sensors which have photogates with high optical transmittance were fabricated based on standard CMOS process. As results of a demonstration which emulates separate detection of excitation light and fluorescence by the fabricated filter-free sensors, detection performance in the near-ultraviolet region has improved a hundredfold compared to a previous sensor.</p>
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 141 (3), 77-82, 2021-03-01
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390568772522365696
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- NII論文ID
- 130007993096
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 031323842
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- CiNii Articles
- KAKEN
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- 抄録ライセンスフラグ
- 使用不可