光てこAFM用カンチレバーに働く表面力とその振動特性への影響

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  • Study on the vibration characteristics of AFM optical cantilever with surface force acting on the tip

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<p>Atomic force microscope (AFM) is a useful tool to quantitively evaluate the micro/nano scale interaction between two bodies and they are measured by the deflection of the cantilever at the end by the optical lever method. Since this method are highly sensitive to the deflection angle, there are gap between the real deflection and the deflection obtained through the optical lever method. In order to measure the surface interaction with higher accuracy, it is important to grasp the vibration characteristics of the cantilever and fix the gap. In this study, vibration characteristics of AFM optical cantilever with surface force acting on the tip were analyzed. Surface force was introduced by assuming a spring and damper acting at the end of the cantilever. The vibration characteristics of cantilever were analyzed by solving the equation of motion with various spring constant and damping coefficient. Furthermore, considering the surface force as van der Waals force, the vibration analysis of cantilever with intermolecular force acting at the end were shown.</p>

収録刊行物

  • 年次大会

    年次大会 2020 (0), S16104-, 2020

    一般社団法人 日本機械学会

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