Triboelectric Nanogenerator with Microstructure Fabricated by 3D Lithography at Contact Interface

• Yanagita Kosuke

  Gunma University

• Iida Taiki

  Gunma University

• Honma Hiroaki

  The University of Tokyo

• Hashiguchi Gen

  Shizuoka University

• Toshiyoshi Hiroshi

  The University of Tokyo

• Suzuki Takaaki

  Gunma University

Bibliographic Information

Other Title

• 3Dリソグラフィ法により作製した微細構造を接触界面に有するトライボ発電デバイス
• 3Dリソグラフィホウ ニ ヨリ サクセイ シタ ビサイ コウゾウ オ セッショク カイメン ニ ユウスル トライボ ハツデン デバイス

Abstract

We propose a triboelectric nanogenerator with pyramidal microstructure array fabricated by 3D lithography at contact interface. Since the actual contact area of the periodic pyramidal structure is relatively easy to predict, we evaluated the relationship between the size of the pyramidal microstructure at the contact interface and the power generation performance in a vertical contact-separation mode.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 141 (7), 254-259, 2021-07-01

  The Institute of Electrical Engineers of Japan

Keywords

• TENG
• energy harvesting
• 3D lithography
• microstructure
• triboelectrification
• MEMS

Details

• CRID: 1390570022236272000
• NII Article ID: 130008060177
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.141.254
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 031605882
• Web Site: http://id.ndl.go.jp/bib/031605882
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I031605882
• Web Site: https://www.jstage.jst.go.jp/article/ieejsmas/141/7/141_254/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN
• Abstract License Flag: Disallowed