光スピンホール効果エリプソメトリの開発（第5報）

DOI

書誌事項

タイトル別名
  • Development of Ellipsometry Based on Spin Hall Effect of Light (5<sup>th</sup> report)
  • 2D distribution of SHEL shift for evaluation of sub-nanometer surface topography
  • 光スピンホール効果の2D分布測定によるサブナノメートル表面トポグラフィー

抄録

<p>In recent years, the discovery of the spin Hall effect of light (SHEL) provided a possibility for new measurement methods for surface qualities. SHEL associated with spin-orbit interactions, describes a transport phenomenon with optical spin-dependent splitting, and the splitting shift correspond to the polarization state of light. Since the core of ellipsometry is calculating surface qualities according to polarization state of optical probe, we proposed a new ellipsometry to obtain surface qualities according to SHEL shift. In last report, we have calculated the surface roughness according to SHEL shift through analytically approach via weak measurement and effective medium approximation(EMA) theory, and then determined the high-sensitivity range of the measurement. In this report, since SHEL ellipsometry effectively shortens the measurement time and SHEL shift is sensitive to roughness variation, we can scan the sample with small interval while realize the evaluation of surface topography according to 2D distribution of SHEL shift. Finally, we realize the highly reproducible detection of cracks and particles. In addition, the special texture detected obtained by topography figure seem to provide a possibility for polishing marks detection.</p>

収録刊行物

キーワード

詳細情報 詳細情報について

  • CRID
    1390570729662209280
  • NII論文ID
    130008084158
  • DOI
    10.11522/pscjspe.2021s.0_641
  • 本文言語コード
    en
  • データソース種別
    • JaLC
    • CiNii Articles
  • 抄録ライセンスフラグ
    使用不可

問題の指摘

ページトップへ