Chemical vapor deposition of highly oriented ceramic coatings in a high-intensity laser irradiation

• ITO Akihiko

  Graduate School of Environment and Information Sciences, Yokohama National University

抄録

High-intensity laser irradiation promotes a chemical reaction between the vapor phase and the film surface in the chemical vapor deposition (CVD) process, resulting in a high-speed deposition and a significant oriented growth of various kinds of oxides, nitrides, carbides, and their compounds and composites. TEM observation revealed unique microstructures, such as columnar, feather-like, and single-crystalline growth, in the produced CVD coatings. This CVD process enables the combination of high-speed epitaxial growth and excellent properties for structural and functional ceramic coatings. Traditional ceramics, such as Al₂O₃, TiO₂, Al₂TiO₅, BaAl₁₂O₁₉, BaTiO₃, YBa₂Cu₃O_7−δ, and CeO₂, can be still highly valued as practical materials by functionalization of ceramic coatings with the control of orientation and nanostructure.

収録刊行物

• Journal of the Ceramic Society of Japan

  Journal of the Ceramic Society of Japan 129 (11), 646-653, 2021-11-01

  公益社団法人 日本セラミックス協会

キーワード

• Chemical vapor deposition
• Ceramic coatings
• Self-oriented growth
• Nanostructure

詳細情報

• CRID: 1390289920607494016
• NII論文ID: 130008110397
• DOI: 10.2109/jcersj2.21135
• ISSN: 13486535
• ISSN: 18820743
• Web Site: https://www.jstage.jst.go.jp/article/jcersj2/129/11/129_21135/_pdf
• 本文言語コード: en
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