Measurement of Magnesium Oxide Sputtering Yields by He and Ar Ions with a Low-Energy Mass-Selected Ion Beam System

• Kiyohiro Hine

• Satoru Yoshimura

• Kazumasa Ikuse

• Masato Kiuchi

• Jun Hashimoto

• Masaharu Terauchi

• Mikihiko Nishitani

• Satoshi Hamaguchi

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 46 (12L), L1132-, 2007-11-22

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360566396806930816
• NII論文ID: 210000063805
• DOI: 10.1143/jjap.46.l1132
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.46.L1132
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.46.L1132/pdf
• データソース種別:
  • Crossref
  • CiNii Articles