Theoretical Study on Relationship between Acid Generation Efficiency and Acid Generator Concentration in Chemically Amplified Extreme Ultraviolet Resists

• Takahiro Kozawa

• Seiichi Tagawa

• Melissa Shell

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 46 (12L), L1143-, 2007-11-30

  IOP Publishing

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1360566396806932608
• NII Article ID: 210000063809
• DOI: 10.1143/jjap.46.l1143
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.46.L1143
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.46.L1143/pdf
• Data Source:
  • Crossref
  • CiNii Articles