Hydrogenation Effects on Chemical Activity of Defects in Excimer-Laser-Annealed Polycrystalline Silicon Thin Films

• Kuninori Kitahara

• Yasutaka Ohashi

• Shin Matsumoto

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 46 (5L), L448-, 2007-05-01

  IOP Publishing

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1360284921830278272
• NII Article ID: 210000063960
• DOI: 10.1143/jjap.46.l448
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.46.L448
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.46.L448/pdf
• Data Source:
  • Crossref
  • CiNii Articles