Reactivity of Halogenated Resist Polymer with Low-Energy Electrons

• Hiroki Yamamoto

• Takahiro Kozawa

• Akinori Saeki

• Seiichi Tagawa

• Takeyoshi Mimura

• Hiroto Yukawa

• Junichi Onodera

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 48 (6S), 06FC09-, 2009-06-01

  IOP Publishing

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1360003446854786560
• NII Article ID: 210000066909
• DOI: 10.1143/jjap.48.06fc09
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.48.06FC09
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.48.06FC09/pdf
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN