Complementary Metal–Oxide–Semiconductor Ion-Sensitive Field-Effect Transistor Sensor Array with Silicon Nitride Film Formed by Catalytic Chemical Vapor Deposition as an Ion-Sensitive Membrane

• Yuji Kagohashi

• Hiroaki Ozawa

• Shigeyasu Uno

• Kazuo Nakazato

• Keisuke Ohdaira

• Hideki Matsumura

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 49 (1), 01AG06-, 2010-01-20

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360847871785306496
• NII Article ID: 210000067868
• DOI: 10.1143/jjap.49.01ag06
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Data Source:
  • Crossref
  • CiNii Articles