Integrated Bio-Imaging Sensor Array with Complementary Metal–Oxide–Semiconductor Cascode Source–Drain Follower

• Hirokazu Matsumoto

• Junichi Tsukada

• Hiroaki Ozawa

• Shigeyasu Uno

• Kazuo Nakazato

• Nao Terasaki

• Noritaka Yamamoto

• Takashi Hiraga

• Masako Iwai

• Masae Konno

• Kohsuke Ito

• Yasunori Inoue

Abstract

A new bio-imaging sensor with photosystem I (PSI) of Thermosynechococcus elongatus and complementary metal–oxide–semiconductor (CMOS) circuits is demonstrated. Photons are converted into electrons by PSI, and electrons are detected as an electric signal by a CMOS integrated circuit. For a sensor circuit, a 4 ×4 sensor array with a CMOS source–drain follower is designed and fabricated by a standard CMOS process. An extended-gate electrode and an SU-8 passivation layer are formed on a CMOS chip by a post-CMOS process, and PSI is electrostatically fixed on the electrode. A 3×4 image of the pattern of light illuminated on a chip is taken with the sensor array, where four cells are used as reference cells.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 49 (4S), 04DL01-, 2010-04-01

  IOP Publishing

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1360566396808806912
• NII Article ID: 210000068359
• DOI: 10.1143/jjap.49.04dl01
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.49.04DL01
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.49.04DL01/pdf
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