Annealing Effect of W Incorporated Diamond-Like Carbon Fabricated by Ga Focused Ion Beam Chemical Vapor Deposition

• Akira Wada

• Tsuneo Suzuki

• Masahito Niibe

• Haruhiko Ito

• Kazuhiro Kanda

抄録

The effects of thermal annealing of W incorporated diamond-like carbon (W-DLC) films fabricated with focused ion beam chemical vapor deposition (FIB-CVD) were investigated using X-ray absorption fine structure near the carbon K-edge (C-K NEXAFS) and the combination of Rutherford backscattering (RBS) and elastic recoil detection analysis (ERDA). W-DLC films were annealed for 32 h at temperatures, T a , between 673 and 1073 K. Comparing the T a dependences of Ga and H contents obtained from RBS-ERDA and the sp 2 /(sp 2 + sp 3 ) ratios from C-K NEXAFS, it was found that even a trace amount of W incorporation into DLC films fabricated by Ga + FIB-CVD may cause a significant sp 3 →sp 2 structural change.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 50 (6S), 06GG05-, 2011-06-01

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360284921833013888
• NII論文ID: 210000070708
• DOI: 10.1143/jjap.50.06gg05
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.50.06GG05
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.50.06GG05/pdf
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