Fabrication of Quartz Cantilevers for Small-Amplitude Dynamic Force Microscopy Using an Optical Deflection Sensor

• Ken-ichi Morita

• Yuuki Sasagawa

• Yuusuke Murai

• Yoshiaki Sugimoto

• Masayuki Abe

• Seizo Morita

抄録

We studied about a method of fabricating quartz cantilevers with a conductive tip. The quartz cantilever is a key part for small-amplitude dynamic force microscopy combined with an optical deflection sensor. The stiffness of cantilevers enables us a stable small-amplitude operation, because a sufficiently high oscillation energy, which is based on a high spring constant value prevents the cantilever from contacting the sample. We performed topographic imaging with atomic resolution and site-specific force distance curve measurement using a quartz cantilever at room temperature.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 50 (8S3), 08LB12-, 2011-08-01

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360284921833183744
• NII論文ID: 210000071141
• DOI: 10.1143/jjap.50.08lb12
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.50.08LB12
• Web Site: https://iopscience.iop.org/article/10.1143/JJAP.50.08LB12/pdf
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