Elastic Softening of Surface Acoustic Wave Caused by Vacancy Orbital in Silicon Wafer

• Keisuke Mitsumoto

  Graduate School of Science and Technology, Niigata University, Niigata 950-2181, Japan

• Mitsuhiro Akatsu

  Graduate School of Science and Technology, Niigata University, Niigata 950-2181, Japan

• Shotaro Baba

  Graduate School of Science and Technology, Niigata University, Niigata 950-2181, Japan

• Rie Takasu

  Graduate School of Science and Technology, Niigata University, Niigata 950-2181, Japan

• Yuichi Nemoto

  Graduate School of Science and Technology, Niigata University, Niigata 950-2181, Japan

• Terutaka Goto

  Graduate School of Science and Technology, Niigata University, Niigata 950-2181, Japan

• Hiroshi Yamada-Kaneta

  Department of Electrical Engineering and Electronics, Kyushu Institute of Technology, Kitakyushyu 804-8550, Japan

• Yuji Furumura

  Philtech Inc., Bunkyo, Tokyo 113-0033, Japan

• Hiroyuki Saito

  GlobalWafers Japan Co., Ltd., Seiro, Niigata 957-0197, Japan

• Kazuhiko Kashima

  GlobalWafers Japan Co., Ltd., Seiro, Niigata 957-0197, Japan

• Yoshihiko Saito

  Toshiba Corporation, Yokohama 225-8522, Japan

収録刊行物

• Journal of the Physical Society of Japan

  Journal of the Physical Society of Japan 83 (3), 034702-, 2014-03-15

  Physical Society of Japan

キーワード

• General Physics and Astronomy

詳細情報

• CRID: 1360284924857847040
• NII論文ID: 210000133000
• DOI: 10.7566/jpsj.83.034702
• ISSN: 13474073
• ISSN: 00319015
• Web Site: https://journals.jps.jp/doi/pdf/10.7566/JPSJ.83.034702
• データソース種別:
  • Crossref
  • CiNii Articles
  • KAKEN