Effect of a metal interlayer under Au catalyst for the preparation of microscale holes in Si substrate by metal-assisted chemical etching

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Journal

  • Japanese Journal of Applied Physics

    Japanese Journal of Applied Physics 58(SA), SAAE07-SAAE07, 2019-02-01

    IOP Publishing

Codes

  • NII Article ID (NAID)
    210000135223
  • ISSN
    0021-4922
  • Data Source
    Crossref 
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