Microanalysis of silicon protrusions with a titanium cap formed via surface melting and solidification under applied tensile stress

• Takashi Nishimura

• Masahiko Tomitori

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 58 (2), 025501-, 2019-01-08

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360566399835806720
• NII Article ID: 210000135275
• DOI: 10.7567/1347-4065/aaf46c
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/58/i=2/a=025501/pdf
• Web Site: http://stacks.iop.org/1347-4065/58/i=2/a=025501?key=crossref.a63c1b3fc6112d6a3d8377a6d2f8449a
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN