Thermal-oxidation-induced local lattice distortion at surface of 4H-SiC(0001) characterized by in-plane X-ray diffractometry

• Adhi Dwi Hatmanto

• Koji Kita

Journal

• Applied Physics Express

  Applied Physics Express 11 (1), 011201-, 2017-12-22

  IOP Publishing

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1360566399837014144
• NII Article ID: 210000136054
• DOI: 10.7567/apex.11.011201
• ISSN: 18820786
• ISSN: 18820778
• ISSN: http://id.crossref.org/issn/18820786
• Web Site: http://stacks.iop.org/1882-0786/11/i=1/a=011201/pdf
• Web Site: http://stacks.iop.org/1882-0786/11/i=1/a=011201?key=crossref.ded05df51ffe3394d763b8c21f332b69
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN