Subnanosecond-laser-induced periodic surface structures on prescratched silicon substrate

• Motoharu Hongo

• Shigeki Matsuo

抄録

Laser-induced periodic surface structures (LIPSS) were fabricated on a prescratched silicon surface by irradiation with subnanosecond laser pulses. Low-spatial-frequency LIPSS (LSFL) were observed in the central and peripheral regions; both had a period Λ close to the laser wavelength λ, and the wavevector orientation was parallel to the electric field of the laser beam. The LSFL in the peripheral region seemed to be growing, that is, expanding in length with increasing number of pulses, into the outer regions. In addition, high-spatial-frequency LIPSS, <?CDATA $\Lambda \lesssim \lambda /2$?> <jats:inline-graphic xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="AP160296if001.gif" xlink:type="simple" /> , were found along the scratches, and their wavevector orientation was parallel to the scratches.

収録刊行物

• Applied Physics Express

  Applied Physics Express 9 (6), 062703-, 2016-05-26

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360003449884565888
• NII論文ID: 210000137933
• DOI: 10.7567/apex.9.062703
• ISSN: 18820786
• ISSN: 18820778
• ISSN: http://id.crossref.org/issn/18820786
• Web Site: http://stacks.iop.org/1882-0786/9/i=6/a=062703/pdf
• Web Site: http://stacks.iop.org/1882-0786/9/i=6/a=062703?key=crossref.4e13a230672e54e859e23571c9bf0be8
• Web Site: https://iopscience.iop.org/article/10.7567/APEX.9.062703
• Web Site: https://iopscience.iop.org/article/10.7567/APEX.9.062703/pdf
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