Ultrathin glass filter fabricated by femtosecond laser processing for high-throughput microparticle filtering

• Yaxiaer Yalikun

• Nobuyuki Tanaka

• Yoichiroh Hosokawa

• Takanori Iino

• Yo Tanaka

Abstract

In this study, we developed a method of fabricating totally glass-based filters having micrometer-scale through holes for high-throughput filtration using a femtosecond laser. Filtration using a membrane-type filter is an indispensable technique for biological, chemical, and physical analysis fields. A larger flow rate or stronger driving pressure will result in a faster filtration. However, conventional high-throughput filtering methods often use a relatively slow flow rate or low pressure owing to the fracture toughness of the filter material. In this study, we introduce a customizable 4-µm-thick glass filter that could be used for high-throughput microparticle filtering at a flow velocity of 4 m/s.

Journal

• Applied Physics Express

  Applied Physics Express 9 (6), 066702-, 2016-05-25

  IOP Publishing

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1360003449884577792
• NII Article ID: 210000137956
• DOI: 10.7567/apex.9.066702
• ISSN: 18820786
• ISSN: 18820778
• ISSN: http://id.crossref.org/issn/18820786
• Web Site: http://stacks.iop.org/1882-0786/9/i=6/a=066702/pdf
• Web Site: http://stacks.iop.org/1882-0786/9/i=6/a=066702?key=crossref.b6d7f2bcbd534bdcd328c43aa07e6b29
• Web Site: https://iopscience.iop.org/article/10.7567/APEX.9.066702
• Web Site: https://iopscience.iop.org/article/10.7567/APEX.9.066702/pdf
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