Epitaxial Indium Tin Oxide Film Deposited on Sapphire Substrate by Solid-Source Electron Cyclotron Resonance Plasma
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 51 (1S), 01AC02-, 2012-01-01
IOP Publishing
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Details 詳細情報について
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- CRID
- 1360566399838860800
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- NII Article ID
- 210000140049
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- ISSN
- 13474065
- 00214922
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- Data Source
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- Crossref
- CiNii Articles