Fast Imaging Ellipsometer Using a LiNbO₃ Electrooptic Crystal

• Lianhua Jin

• Riyouma Yagi

• Kuniharu Takizawa

• Eiichi Kondoh

Abstract

The LiNbO 3 electrooptic crystal has been used as a phase modulator in polarimetry for fast single-point measurements. This paper aims to extend the application of the LiNbO 3 electrooptic crystal to the two-dimensional polarimetric measurement and develop a fast imaging ellipsometer using the crystal. Ellipsometric imaging is made from intensity images measured at four-step phase modulation. The initial birefringence variance of the LiNbO 3 electrooptic crystal across the view field is compensated by using a calibration sample. A complete image measurement is performed in 3.5 s. An Au-sputtered glass plate and a silicon wafer deposited with a patterned aluminum film are measured to examine the functionality of this ellipsometer. The measurement results show the feasibility of the application of this system to the qualitative measurements of samples.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 52 (3R), 036702-, 2013-02-12

  IOP Publishing

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1360847874816524800
• NII Article ID: 210000141901
• DOI: 10.7567/jjap.52.036702
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.52.036702
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.52.036702/pdf
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN