Fabrication of Silicon Microchannel for Transport of Bacterial Cells by Ar/F<sub>2</sub> Vapor Etching Process
Abstract
<jats:p> We fabricated a Si based microchannel without cover plates by an Ar/F<jats:sub>2</jats:sub> vapor etching process. In the Ar/F<jats:sub>2</jats:sub> vapor etching process, the Si substrate was etched in proportion to the etching time with good controllability. We succeeded in the transport of <jats:italic>Escherichia coli</jats:italic> cells in the microchannel. In addition, we fabricated a Si-based two-step microchannel without cover plates by Ar/F<jats:sub>2</jats:sub> vapor etching and Cl<jats:sub>2</jats:sub>-based inductively coupled plasma (ICP) etching processes. The proposed microchannel would be useful for the separation of bacterial cells according to size. </jats:p>
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 52 (4R), 047001-, 2013-03-14
IOP Publishing
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Details 詳細情報について
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- CRID
- 1360566399839912704
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- NII Article ID
- 210000141963
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- ISSN
- 13474065
- 00214922
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- Data Source
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- Crossref
- CiNii Articles
- KAKEN