Fabrication of a Quartz-Crystal-Microbalance/Optical-Waveguide Hybrid Sensor and In situ Evaluation of Vacuum-Evaporated Lead Phthalocyanine Thin Film

• Kazunari Shinbo

• Akihiro Uno

• Ryo Hirakawa

• Akira Baba

• Yasuo Ohdaira

• Keizo Kato

• Futao Kaneko

抄録

In this study, we fabricated a novel quartz-crystal-microbalance (QCM)/optical-waveguide hybrid sensor. An in situ observation of a lead phthalocyanine (PbPc) thin-film deposition was conducted during vacuum evaporation, and the effectiveness of the sensor was demonstrated. The film thickness was obtained from the QCM frequency, and the optical absorption of the film was observed by optical waveguide spectroscopy using part of the QCM substrate without the electrode. The film absorption depends on the polarization direction, substrate temperature and deposition rate, owing to aggregate formation. The thickness dependence of the absorption property was also investigated.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 52 (5S1), 05DC20-, 2013-05-01

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360284924863607040
• NII論文ID: 210000142246
• DOI: 10.7567/jjap.52.05dc20
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.52.05DC20
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.52.05DC20/pdf
• データソース種別:
  • Crossref
  • CiNii Articles
  • KAKEN