Formation of Silicon-on-Nothing Structures with Extremely Flat Surfaces

Access this Article

Journal

  • Japanese Journal of Applied Physics

    Japanese Journal of Applied Physics 52(7R), 075601-075601, 2013-07-01

    IOP Publishing

Codes

  • NII Article ID (NAID)
    210000142454
  • ISSN
    0021-4922
  • Data Source
    Crossref 
Page Top