Measurements of Nonlinear Dielectric Constants of Pb(Zr,Ti)O₃ Thin Films Using a Dynamic Measuring Method

• Yoshiomi Hiranaga

• Yasuo Cho

抄録

The nonlinear dielectric constants of Pb(Zr,Ti)O 3 (PZT) thin films were studied using a dynamic measuring method. The 111-oriented PZT thin films with various Zr/Ti ratios were deposited on platinum-coated silicon substrates using a sol–gel method. The ε 333 of the films increased with the Zr concentration in the tetragonal region and reached a maximum value of 280 aF/V close to the morphotropic phase boundary (Zr/Ti= 52/48). This measured value is 400 times larger than that of LiTaO 3 single crystals.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 52 (9S1), 09KA08-, 2013-09-01

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360847874817885568
• NII論文ID: 210000142824
• DOI: 10.7567/jjap.52.09ka08
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.52.09KA08
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.52.09KA08/pdf
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