Annealing Transformation of Diamond-Like Carbon Using Ni Catalyst

• Junji Sone

• Naoto Shigeta

• Katsumi Yamada

• Takayuki Uchida

• Shinya Yoshida

• Takeshi Hayasaka

• Shuji Tanaka

抄録

We have considered diamond-like carbon (DLC) graphitization by low-temperature annealing with a Ni catalyst, for MEMS usage with thick DLC films. For DLC films, annealing at 350–450 °C was effective for improving the I (D)/ I (G) ratio of their Raman spectra, and their surface roughness was unaffected by the annealing temperature.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 52 (12R), 128005-, 2013-11-18

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360003449888365696
• NII論文ID: 210000143208
• DOI: 10.7567/jjap.52.128005
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.52.128005
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.52.128005/pdf
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