Diamond-like carbon doped with highly π-conjugated molecules by plasma-assisted CVD

• Wei Xie

• Naoki Muraya

• Takashi Yanase

• Taro Nagahama

• Toshihiro Shimada

抄録

We demonstrate the synthesis of diamond-like carbon (DLC) doped with highly π-conjugated molecules by codepositing organic semiconductor molecules during the plasma-assisted chemical vapor deposition of DLC. From the results of optical absorption spectroscopy, it was revealed that organic semiconductor molecules reacted with plasma but were not completely decomposed. The results of Raman spectroscopy strongly suggested that a certain chemical moiety remained in the film.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 53 (1), 010203-, 2013-12-19

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360284924865083776
• NII論文ID: 210000143215
• DOI: 10.7567/jjap.53.010203
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.53.010203
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.53.010203/pdf
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