Reactions of surface hydrogen on amorphous carbon films with hydrogen plasma
Abstract
<jats:p>Reactions of surface hydrocarbon components exposed to hydrogen plasma at a substrate temperature of 200 °C were investigated by in-situ infrared spectroscopy, and changes in film thickness were measured. Both the concentration of hydrocarbon components and film thickness decreased because of the hydrogen plasma exposure. The decrease in the former was larger than that in the latter. These results indicate that the abstraction effect of surface hydrogen, as well as the etching effect, was enhanced at 200 °C.</jats:p>
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 53 (1), 010204-, 2013-12-18
IOP Publishing
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Details 詳細情報について
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- CRID
- 1360003449888372992
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- NII Article ID
- 210000143216
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- ISSN
- 13474065
- 00214922
- http://id.crossref.org/issn/13474065
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- Data Source
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- Crossref
- CiNii Articles
- KAKEN