Fabrication of silica moth-eye structures by photo-nanoimprinting using ordered anodic porous alumina molds

• Takashi Yanagishita

• Takahide Endo

• Kazuyuki Nishio

• Hideki Masuda

Abstract

Moth-eye structures composed of an ordered array of tapered SiO 2 pillars were fabricated by photo-nanoimprinting using anodic porous alumina as a mold. The formation of SiO 2 moth-eye structures was carried out using a photosensitive polysilane solution as a precursor of silica. The SiO 2 moth-eye structures formed on the surface of a glass plate effectively suppressed the reflection of incident light.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 53 (1), 018002-, 2013-12-13

  IOP Publishing

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1360566399841851392
• NII Article ID: 210000143252
• DOI: 10.7567/jjap.53.018002
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.53.018002
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.53.018002/pdf
• Data Source:
  • Crossref
  • CiNii Articles