Structural and electrical transport properties of MOVPE-grown pseudomorphic AlAs/InGaAs/InAs resonant tunneling diodes on InP substrates

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<jats:p>We report metal–organic vapor-phase epitaxy (MOVPE) growth of pseudomorphic AlAs/InGaAs/InAs resonant tunneling diodes (RTDs) on InP substrates for the first time. X-ray diffraction (XRD) measurements and transmission electron microscopy (TEM) observations reveal that a uniform strained InAs subwell is coherently grown in the double-barrier (DB) structure. The AlAs/InGaAs/InAs RTDs exhibit excellent current–voltage characteristics with a high peak current density (<jats:italic>J</jats:italic> <jats:sub>P</jats:sub>) of around 2 × 10<jats:sup>5</jats:sup> A/cm<jats:sup>2</jats:sup> and peak-to-valley ratio (<jats:italic>PVR</jats:italic>) of around 6. A comparison with control RTDs consisting of AlAs/In<jats:sub>0.8</jats:sub>Ga<jats:sub>0.2</jats:sub>As DB confirms the effectiveness of InAs subwell insertion for the improvement of <jats:italic>PVR</jats:italic>.</jats:p>

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