Estimation of the pressure–distance product for thermalization in sputtering for some selected metal atoms by Monte Carlo simulation
抄録
<jats:p>We propose a method to obtain the pressure–distance product (<jats:italic>pd</jats:italic>) for thermalization in the sputtering process using a Monte Carlo (MC) simulation. Sputter-ejected atoms proceed forward with high energy, and fall into random motion finally. That is, after many MC trials the “average position” of atoms reaches saturation. The thermalization distance <jats:italic>d</jats:italic> can be estimated from this saturation position. We could obtain the <jats:italic>pd</jats:italic> product for Al, Cu, and Mo in argon atmosphere. The <jats:italic>pd</jats:italic> values agreed well with the pressure dependence of the deposition profile observed experimentally.</jats:p>
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 53 (3), 038002-, 2014-02-05
IOP Publishing
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詳細情報 詳細情報について
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- CRID
- 1360284924865472000
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- NII論文ID
- 210000143458
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- ISSN
- 13474065
- 00214922
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