Amperometric electrochemical sensor array for on-chip simultaneous imaging

• Tsuyoshi Kuno

• Kiichi Niitsu

• Kazuo Nakazato

Abstract

We propose an amperometric electrochemical sensor array for high-speed measurement of microelectrode currents. The biosensor was fabricated using CMOS technology and a contact photolithographic process to incorporate gold microelectrodes (256 electrodes) on a chip. The sensor circuit employed a current buffer circuit and dual switch. During measurement, all electrodes were kept at a constant potential, currents were at steady-state levels, and rapid switching was performed while maintaining the steady-state current. The measured current range of the current buffer circuit was approximately 1 pA to 1 µA. A microelectrode array (MEA) with auxiliary electrode (AE) was used to suppress expansion of the diffusion layer over the MEA. Steady-state current was obtained and amplified by redox cycling, greatly reducing the time for reaching the steady-state level. The sensor successfully simultaneously measured multipoint cyclic voltammetry and amperometry, and will be useful for measuring local concentration and analyzing the diffusion processes of target molecules.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 53 (4S), 04EL01-, 2014-02-10

  IOP Publishing

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1360284924865822720
• NII Article ID: 210000143670
• DOI: 10.7567/jjap.53.04el01
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.53.04EL01
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.53.04EL01/pdf
• Data Source:
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  • CiNii Articles
  • KAKEN