Cathodoluminescence spectra of Ga–In–O polycrystalline films fabricated by molecular precursor method

Abstract

<jats:p>Cathodoluminescence (CL) spectra were measured from polycrystalline Ga–In–O (GIO) films prepared by the molecular precursor method (MPM). Bandgap-energy (<jats:italic>E</jats:italic> <jats:sub>g</jats:sub>) and conductivity were successfully controlled by changing in the mixing ratio of the Ga and In precursor solutions. Although none of the films exhibited a near-band-edge emission, their CL emissions exhibited energy shifts by reflecting changes in <jats:italic>E</jats:italic> <jats:sub>g</jats:sub> and ligand field in the GIO alloys. The results indicate a practical use of MPM-grown GIO films for deep ultraviolet optoelectronic devices.</jats:p>

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