Loss reduction of Si optical waveguides by beam step-size fracturing technique in electron beam lithography

• Yuki Atsumi

• Nit Taksatorn

• Nobuhiko Nishiyama

• Yasuyuki Miyamoto

• Shigehisa Arai

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 53 (6S), 06JB04-, 2014-05-28

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360566399842892800
• NII Article ID: 210000144071
• DOI: 10.7567/jjap.53.06jb04
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/53/i=6S/a=06JB04/pdf
• Web Site: http://stacks.iop.org/1347-4065/53/i=6S/a=06JB04?key=crossref.fb1ae84c79252d1fcb060eb40d8dbc20
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN