Multiple breakdown model of carpet-bombing-like concaves formed during dielectric breakdown of silicon carbide metal–oxide–semiconductor capacitors

• Soshi Sato

• Yuki Hiroi

• Kikuo Yamabe

• Makoto Kitabatake

• Tetsuo Endoh

• Masaaki Niwa

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 53 (8S1), 08LA01-, 2014-07-01

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360566399843000704
• NII Article ID: 210000144325
• DOI: 10.7567/jjap.53.08la01
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/53/i=8S1/a=08LA01/pdf
• Web Site: http://stacks.iop.org/1347-4065/53/i=8S1/a=08LA01?key=crossref.3a55c186768d6f5ced09ad277cdf3706
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN