Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy

• Masanori Shinohara

• Yujiro Taniguchi

• Yuya Takaki

• Yoshinobu Matsuda

• Hiroshi Fujiyama

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 53 (9), 096202-, 2014-08-22

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360566399843057536
• NII Article ID: 210000144458
• DOI: 10.7567/jjap.53.096202
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/53/i=9/a=096202/pdf
• Web Site: http://stacks.iop.org/1347-4065/53/i=9/a=096202?key=crossref.19f227ea15cdf9ac9781c45f46440083
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN