Study on the effect of heat treatment conditions on metalorganic-chemical-vapor-deposited ferroelectric Hf_0.5Zr_0.5O₂thin film on Ir electrode

• Takao Shimizu

• Tatsuhiko Yokouchi

• Takahisa Shiraishi

• Takahiro Oikawa

• P. S. Sankara Rama Krishnan

• Hioshi Funakubo

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 53 (9S), 09PA04-, 2014-09-01

  IOP Publishing

キーワード

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

詳細情報

• CRID: 1360283696336020992
• NII論文ID: 210000144473
• DOI: 10.7567/jjap.53.09pa04
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/53/i=9S/a=09PA04/pdf
• Web Site: http://stacks.iop.org/1347-4065/53/i=9S/a=09PA04?key=crossref.2dcaceba4805327c3de7ac9dacfb9af0
• データソース種別:
  • Crossref
  • CiNii Articles
  • KAKEN