Inclination of a threading dislocation in an epilayer of 4H-SiC

• Hiroyasu Saka

• Hiroki Watanabe

• Yasuo Kitou

• Hiroyuki Kondo

• Fusao Hirose

• Shoichi Onda

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 53 (11), 111302-, 2014-10-20

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360284924866393344
• NII Article ID: 210000144564
• DOI: 10.7567/jjap.53.111302
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Web Site: http://stacks.iop.org/1347-4065/53/i=11/a=111302/pdf
• Web Site: http://stacks.iop.org/1347-4065/53/i=11/a=111302?key=crossref.b73544684dd61bec2659ad1be1a06712
• Data Source:
  • Crossref
  • CiNii Articles