Properties of ultrathin-body condensation Ge-on-insulator films thinned by additional thermal oxidation

• Wu-Kang Kim

• Mitsuru Takenaka

• Shinichi Takagi

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 54 (4S), 04DA05-, 2015-02-24

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360003449889840384
• NII Article ID: 210000144952
• DOI: 10.7567/jjap.54.04da05
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/54/i=4S/a=04DA05/pdf
• Web Site: http://stacks.iop.org/1347-4065/54/i=4S/a=04DA05?key=crossref.996a659a0ca8e240277b6e8c8aff7a26
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN