A 0.1 G-to-20 G integrated MEMS inertial sensor

• Daisuke Yamane

• Toshifumi Konishi

• Takaaki Matsushima

• Hiroshi Toshiyoshi

• Kazuya Masu

• Katsuyuki Machida

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 54 (8), 087202-, 2015-07-07

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360566399843511936
• NII Article ID: 210000145523
• DOI: 10.7567/jjap.54.087202
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Web Site: http://stacks.iop.org/1347-4065/54/i=8/a=087202/pdf
• Web Site: http://stacks.iop.org/1347-4065/54/i=8/a=087202?key=crossref.94d49cef9d28b8bb63ec279a28bc2fca
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN