Effect of N₂O-doped buffer layer on the optical properties of ZnO films grown on glass substrates using high-energy H₂O generated by catalytic reaction

• Shingo Kanauchi

• Yuki Ohashi

• Koichiro Ohishi

• Hironori Katagiri

• Yasuhiro Tamayama

• Takahiro Kato

• Kanji Yasui

Abstract

Improvement in the optical properties of ZnO films grown on glass substrates was investigated using a N 2 O-doped buffer layer inserted between the glass substrate and a ZnO film deposited by chemical vapor deposition (CVD). ZnO films were grown at 773 K using dimethylzinc (DMZn) and high-temperature H 2 O generated by catalytic reaction as zinc and oxygen sources, respectively. Crystal growth was enhanced for the ZnO film grown on the N 2 O-doped buffer layer, and the fluctuation in crystal orientation along the c -axis became less than that for a film grown directly on the glass substrate by CVD. The optical transmittance of the film in the wavelength range of 375–700 nm also increased with insertion of the buffer layer.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 55 (2S), 02BC14-, 2016-01-08

  IOP Publishing

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1360847874820465024
• NII Article ID: 210000146083
• DOI: 10.7567/jjap.55.02bc14
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.55.02BC14
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.55.02BC14/pdf
• Data Source:
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